11/21/2011	9:00:14 AM	Tube furnace set to 50
11/21/2011	9:00:52 AM	Main Vac valve closed
11/21/2011	9:01:38 AM	Main Vac valve opened
11/21/2011	9:03:09 AM	Recipe started at 9:03 AM
11/21/2011	9:03:09 AM	Helium valve closed
11/21/2011	9:03:09 AM	H2 valve closed
11/21/2011	9:03:09 AM	BCl3 valve closed
11/21/2011	9:03:09 AM	PH3 valve closed
11/21/2011	9:03:09 AM	SiCl4 pre valve closed
11/21/2011	9:03:09 AM	SiCl4 post valve closed
11/21/2011	9:03:09 AM	Main Vac valve closed
11/21/2011	9:03:09 AM	Bypass valve closed
11/21/2011	9:03:09 AM	Bubbler valve closed
11/21/2011	9:03:09 AM	Helium MFC set to  0.000000
11/21/2011	9:03:09 AM	H2 MFC set to  0.000000
11/21/2011	9:03:09 AM	BCl3 MFC set to  0.000000
11/21/2011	9:03:09 AM	PHl3 MFC set to  0.000000
11/21/2011	9:03:09 AM	SiCl4 MFC set to  0.000000
11/21/2011	9:03:09 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:03:09 AM	Tube furnace set to 0
11/21/2011	9:03:12 AM	Helium valve closed
11/21/2011	9:03:12 AM	BCl3 valve closed
11/21/2011	9:03:12 AM	PH3 valve closed
11/21/2011	9:03:12 AM	SiCl4 pre valve closed
11/21/2011	9:03:12 AM	SiCl4 post valve closed
11/21/2011	9:03:12 AM	Main Vac valve closed
11/21/2011	9:03:12 AM	Bypass valve closed
11/21/2011	9:03:12 AM	Bubbler valve closed
11/21/2011	9:03:12 AM	H2 valve opened
11/21/2011	9:03:12 AM	Helium MFC set to  0.000000
11/21/2011	9:03:12 AM	H2 MFC set to  500.000000
11/21/2011	9:03:12 AM	BCl3 MFC set to  0.000000
11/21/2011	9:03:12 AM	PHl3 MFC set to  0.000000
11/21/2011	9:03:12 AM	SiCl4 MFC set to  0.000000
11/21/2011	9:03:12 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:03:12 AM	Tube furnace set to 50
11/21/2011	9:04:19 AM	Helium valve closed
11/21/2011	9:04:19 AM	BCl3 valve closed
11/21/2011	9:04:19 AM	PH3 valve closed
11/21/2011	9:04:19 AM	SiCl4 pre valve closed
11/21/2011	9:04:19 AM	SiCl4 post valve closed
11/21/2011	9:04:19 AM	Main Vac valve closed
11/21/2011	9:04:19 AM	Bypass valve closed
11/21/2011	9:04:19 AM	H2 valve opened
11/21/2011	9:04:19 AM	Bubbler valve opened
11/21/2011	9:04:19 AM	Helium MFC set to  0.000000
11/21/2011	9:04:19 AM	H2 MFC set to  500.000000
11/21/2011	9:04:19 AM	BCl3 MFC set to  0.000000
11/21/2011	9:04:19 AM	PHl3 MFC set to  0.000000
11/21/2011	9:04:19 AM	SiCl4 MFC set to  0.000000
11/21/2011	9:04:19 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:04:19 AM	Tube furnace set to 50
11/21/2011	9:04:20 AM	Helium valve closed
11/21/2011	9:04:20 AM	BCl3 valve closed
11/21/2011	9:04:20 AM	PH3 valve closed
11/21/2011	9:04:20 AM	SiCl4 pre valve closed
11/21/2011	9:04:20 AM	SiCl4 post valve closed
11/21/2011	9:04:20 AM	Main Vac valve closed
11/21/2011	9:04:20 AM	Bypass valve closed
11/21/2011	9:04:20 AM	H2 valve opened
11/21/2011	9:04:20 AM	Bubbler valve opened
11/21/2011	9:04:20 AM	Helium MFC set to  0.000000
11/21/2011	9:04:20 AM	H2 MFC set to  450.000000
11/21/2011	9:04:20 AM	BCl3 MFC set to  0.000000
11/21/2011	9:04:20 AM	PHl3 MFC set to  0.000000
11/21/2011	9:04:20 AM	SiCl4 MFC set to  0.000000
11/21/2011	9:04:20 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:04:21 AM	Tube furnace set to 1000
11/21/2011	9:27:21 AM	Helium valve closed
11/21/2011	9:27:21 AM	PH3 valve closed
11/21/2011	9:27:21 AM	Main Vac valve closed
11/21/2011	9:27:21 AM	Bypass valve closed
11/21/2011	9:27:21 AM	H2 valve opened
11/21/2011	9:27:21 AM	BCl3 valve opened
11/21/2011	9:27:21 AM	SiCl4 pre valve opened
11/21/2011	9:27:21 AM	SiCl4 post valve opened
11/21/2011	9:27:21 AM	Bubbler valve opened
11/21/2011	9:27:21 AM	Helium MFC set to  0.000000
11/21/2011	9:27:21 AM	H2 MFC set to  495.000000
11/21/2011	9:27:21 AM	BCl3 MFC set to  0.800000
11/21/2011	9:27:21 AM	PHl3 MFC set to  0.000000
11/21/2011	9:27:21 AM	SiCl4 MFC set to  25.000000
11/21/2011	9:27:21 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:27:21 AM	Tube furnace set to 1000
11/21/2011	9:49:21 AM	Helium valve closed
11/21/2011	9:49:21 AM	BCl3 valve closed
11/21/2011	9:49:21 AM	PH3 valve closed
11/21/2011	9:49:21 AM	SiCl4 pre valve closed
11/21/2011	9:49:21 AM	SiCl4 post valve closed
11/21/2011	9:49:21 AM	Main Vac valve closed
11/21/2011	9:49:21 AM	Bypass valve closed
11/21/2011	9:49:21 AM	H2 valve opened
11/21/2011	9:49:21 AM	Bubbler valve opened
11/21/2011	9:49:21 AM	Helium MFC set to  0.000000
11/21/2011	9:49:21 AM	H2 MFC set to  500.000000
11/21/2011	9:49:21 AM	BCl3 MFC set to  0.000000
11/21/2011	9:49:21 AM	PHl3 MFC set to  0.000000
11/21/2011	9:49:21 AM	SiCl4 MFC set to  0.000000
11/21/2011	9:49:21 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:49:21 AM	Tube furnace set to 750
11/21/2011	9:59:21 AM	H2 valve closed
11/21/2011	9:59:21 AM	BCl3 valve closed
11/21/2011	9:59:21 AM	PH3 valve closed
11/21/2011	9:59:21 AM	SiCl4 pre valve closed
11/21/2011	9:59:21 AM	SiCl4 post valve closed
11/21/2011	9:59:21 AM	Main Vac valve closed
11/21/2011	9:59:21 AM	Bypass valve closed
11/21/2011	9:59:21 AM	Helium valve opened
11/21/2011	9:59:21 AM	Bubbler valve opened
11/21/2011	9:59:21 AM	Helium MFC set to  400.000000
11/21/2011	9:59:21 AM	H2 MFC set to  0.000000
11/21/2011	9:59:21 AM	BCl3 MFC set to  0.000000
11/21/2011	9:59:21 AM	PHl3 MFC set to  0.000000
11/21/2011	9:59:21 AM	SiCl4 MFC set to  0.000000
11/21/2011	9:59:21 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:59:21 AM	Tube furnace set to 0
11/21/2011	10:23:33 AM	Run aborted at 10:23 AM
11/21/2011	10:23:33 AM	Helium valve closed
11/21/2011	10:23:33 AM	H2 valve closed
11/21/2011	10:23:33 AM	BCl3 valve closed
11/21/2011	10:23:33 AM	PH3 valve closed
11/21/2011	10:23:33 AM	SiCl4 pre valve closed
11/21/2011	10:23:33 AM	SiCl4 post valve closed
11/21/2011	10:23:33 AM	Bypass valve closed
11/21/2011	10:23:33 AM	Main Vac valve closed
11/21/2011	10:23:33 AM	Bubbler valve closed
11/21/2011	10:23:33 AM	Helium MFC set to  0.000000
11/21/2011	10:23:33 AM	H2 MFC set to  0.000000
11/21/2011	10:23:33 AM	BCl3 MFC set to  0.000000
11/21/2011	10:23:33 AM	PHl3 MFC set to  0.000000
11/21/2011	10:23:33 AM	SiCl4 MFC set to  0.000000
11/21/2011	10:23:33 AM	Tube furnace set to 0
11/21/2011	10:27:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2011	10:27:02 AM	Recipe started at 10:27 AM
11/21/2011	10:27:02 AM	Helium valve closed
11/21/2011	10:27:02 AM	H2 valve closed
11/21/2011	10:27:02 AM	BCl3 valve closed
11/21/2011	10:27:02 AM	PH3 valve closed
11/21/2011	10:27:02 AM	SiCl4 pre valve closed
11/21/2011	10:27:02 AM	SiCl4 post valve closed
11/21/2011	10:27:02 AM	Main Vac valve closed
11/21/2011	10:27:02 AM	Bubbler valve closed
11/21/2011	10:27:02 AM	Bypass valve opened
11/21/2011	10:27:02 AM	Helium MFC set to  0.000000
11/21/2011	10:27:02 AM	H2 MFC set to  0.000000
11/21/2011	10:27:02 AM	BCl3 MFC set to  0.000000
11/21/2011	10:27:02 AM	PHl3 MFC set to  0.000000
11/21/2011	10:27:02 AM	SiCl4 MFC set to  0.000000
11/21/2011	10:27:02 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:27:02 AM	Tube furnace set to 0
11/21/2011	10:28:38 AM	Helium valve closed
11/21/2011	10:28:38 AM	H2 valve closed
11/21/2011	10:28:38 AM	BCl3 valve closed
11/21/2011	10:28:38 AM	PH3 valve closed
11/21/2011	10:28:38 AM	SiCl4 pre valve closed
11/21/2011	10:28:38 AM	SiCl4 post valve closed
11/21/2011	10:28:38 AM	Main Vac valve closed
11/21/2011	10:28:38 AM	Bubbler valve closed
11/21/2011	10:28:38 AM	Bypass valve opened
11/21/2011	10:28:38 AM	Helium MFC set to  0.000000
11/21/2011	10:28:38 AM	H2 MFC set to  0.000000
11/21/2011	10:28:38 AM	BCl3 MFC set to  0.000000
11/21/2011	10:28:38 AM	PHl3 MFC set to  0.000000
11/21/2011	10:28:38 AM	SiCl4 MFC set to  0.000000
11/21/2011	10:28:38 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:28:38 AM	Tube furnace set to 0
11/21/2011	10:29:38 AM	Helium valve closed
11/21/2011	10:29:38 AM	H2 valve closed
11/21/2011	10:29:38 AM	BCl3 valve closed
11/21/2011	10:29:38 AM	PH3 valve closed
11/21/2011	10:29:38 AM	SiCl4 pre valve closed
11/21/2011	10:29:38 AM	SiCl4 post valve closed
11/21/2011	10:29:38 AM	Bypass valve closed
11/21/2011	10:29:38 AM	Bubbler valve closed
11/21/2011	10:29:38 AM	Main Vac valve opened
11/21/2011	10:29:38 AM	Helium MFC set to  0.000000
11/21/2011	10:29:38 AM	H2 MFC set to  0.000000
11/21/2011	10:29:38 AM	BCl3 MFC set to  0.000000
11/21/2011	10:29:38 AM	PHl3 MFC set to  0.000000
11/21/2011	10:29:38 AM	SiCl4 MFC set to  0.000000
11/21/2011	10:29:38 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:29:38 AM	Tube furnace set to 0
11/21/2011	10:29:39 AM	Run finished at 10:29 AM
11/21/2011	10:29:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2011	10:58:43 AM	Main Vac valve closed
11/21/2011	10:59:00 AM	Main Vac valve opened
11/21/2011	10:59:30 AM	Recipe started at 10:59 AM
11/21/2011	10:59:30 AM	Helium valve closed
11/21/2011	10:59:30 AM	H2 valve closed
11/21/2011	10:59:30 AM	BCl3 valve closed
11/21/2011	10:59:30 AM	PH3 valve closed
11/21/2011	10:59:30 AM	SiCl4 pre valve closed
11/21/2011	10:59:30 AM	SiCl4 post valve closed
11/21/2011	10:59:30 AM	Bypass valve closed
11/21/2011	10:59:30 AM	Bubbler valve closed
11/21/2011	10:59:30 AM	Main Vac valve opened
11/21/2011	10:59:30 AM	Helium MFC set to  0.000000
11/21/2011	10:59:30 AM	H2 MFC set to  0.000000
11/21/2011	10:59:30 AM	BCl3 MFC set to  0.000000
11/21/2011	10:59:30 AM	PHl3 MFC set to  0.000000
11/21/2011	10:59:30 AM	SiCl4 MFC set to  0.000000
11/21/2011	10:59:30 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:59:31 AM	Tube furnace set to 0
11/21/2011	10:59:34 AM	H2 valve closed
11/21/2011	10:59:34 AM	BCl3 valve closed
11/21/2011	10:59:34 AM	PH3 valve closed
11/21/2011	10:59:34 AM	SiCl4 pre valve closed
11/21/2011	10:59:34 AM	SiCl4 post valve closed
11/21/2011	10:59:34 AM	Bypass valve closed
11/21/2011	10:59:34 AM	Bubbler valve closed
11/21/2011	10:59:34 AM	Helium valve opened
11/21/2011	10:59:34 AM	Main Vac valve opened
11/21/2011	10:59:34 AM	Helium MFC set to  20.000000
11/21/2011	10:59:34 AM	H2 MFC set to  0.000000
11/21/2011	10:59:34 AM	BCl3 MFC set to  0.000000
11/21/2011	10:59:34 AM	PHl3 MFC set to  0.000000
11/21/2011	10:59:34 AM	SiCl4 MFC set to  0.000000
11/21/2011	10:59:34 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:59:34 AM	Tube furnace set to 0
11/21/2011	10:59:55 AM	Helium valve closed
11/21/2011	10:59:55 AM	H2 valve closed
11/21/2011	10:59:55 AM	BCl3 valve closed
11/21/2011	10:59:55 AM	PH3 valve closed
11/21/2011	10:59:55 AM	SiCl4 pre valve closed
11/21/2011	10:59:55 AM	SiCl4 post valve closed
11/21/2011	10:59:55 AM	Bypass valve closed
11/21/2011	10:59:55 AM	Bubbler valve closed
11/21/2011	10:59:55 AM	Main Vac valve opened
11/21/2011	10:59:55 AM	Helium MFC set to  0.000000
11/21/2011	10:59:55 AM	H2 MFC set to  0.000000
11/21/2011	10:59:55 AM	BCl3 MFC set to  0.000000
11/21/2011	10:59:55 AM	PHl3 MFC set to  0.000000
11/21/2011	10:59:55 AM	SiCl4 MFC set to  0.000000
11/21/2011	10:59:55 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:59:55 AM	Tube furnace set to 0
11/21/2011	11:01:55 AM	H2 valve closed
11/21/2011	11:01:55 AM	BCl3 valve closed
11/21/2011	11:01:55 AM	PH3 valve closed
11/21/2011	11:01:55 AM	SiCl4 pre valve closed
11/21/2011	11:01:55 AM	SiCl4 post valve closed
11/21/2011	11:01:55 AM	Bypass valve closed
11/21/2011	11:01:55 AM	Bubbler valve closed
11/21/2011	11:01:55 AM	Helium valve opened
11/21/2011	11:01:55 AM	Main Vac valve opened
11/21/2011	11:01:55 AM	Helium MFC set to  20.000000
11/21/2011	11:01:55 AM	H2 MFC set to  0.000000
11/21/2011	11:01:55 AM	BCl3 MFC set to  0.000000
11/21/2011	11:01:55 AM	PHl3 MFC set to  0.000000
11/21/2011	11:01:55 AM	SiCl4 MFC set to  0.000000
11/21/2011	11:01:55 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	11:01:55 AM	Tube furnace set to 0
11/21/2011	11:02:15 AM	Helium valve closed
11/21/2011	11:02:15 AM	H2 valve closed
11/21/2011	11:02:15 AM	BCl3 valve closed
11/21/2011	11:02:15 AM	PH3 valve closed
11/21/2011	11:02:15 AM	SiCl4 pre valve closed
11/21/2011	11:02:15 AM	SiCl4 post valve closed
11/21/2011	11:02:15 AM	Bypass valve closed
11/21/2011	11:02:15 AM	Bubbler valve closed
11/21/2011	11:02:15 AM	Main Vac valve opened
11/21/2011	11:02:15 AM	Helium MFC set to  0.000000
11/21/2011	11:02:15 AM	H2 MFC set to  0.000000
11/21/2011	11:02:15 AM	BCl3 MFC set to  0.000000
11/21/2011	11:02:15 AM	PHl3 MFC set to  0.000000
11/21/2011	11:02:15 AM	SiCl4 MFC set to  0.000000
11/21/2011	11:02:15 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	11:02:15 AM	Tube furnace set to 50
11/21/2011	11:04:15 AM	H2 valve closed
11/21/2011	11:04:15 AM	BCl3 valve closed
11/21/2011	11:04:15 AM	PH3 valve closed
11/21/2011	11:04:15 AM	SiCl4 pre valve closed
11/21/2011	11:04:15 AM	SiCl4 post valve closed
11/21/2011	11:04:15 AM	Bypass valve closed
11/21/2011	11:04:15 AM	Bubbler valve closed
11/21/2011	11:04:15 AM	Helium valve opened
11/21/2011	11:04:15 AM	Main Vac valve opened
11/21/2011	11:04:15 AM	Helium MFC set to  20.000000
11/21/2011	11:04:15 AM	H2 MFC set to  0.000000
11/21/2011	11:04:15 AM	BCl3 MFC set to  0.000000
11/21/2011	11:04:15 AM	PHl3 MFC set to  0.000000
11/21/2011	11:04:15 AM	SiCl4 MFC set to  0.000000
11/21/2011	11:04:15 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	11:04:15 AM	Tube furnace set to 50
11/21/2011	11:04:35 AM	Helium valve closed
11/21/2011	11:04:35 AM	H2 valve closed
11/21/2011	11:04:35 AM	BCl3 valve closed
11/21/2011	11:04:35 AM	PH3 valve closed
11/21/2011	11:04:35 AM	SiCl4 pre valve closed
11/21/2011	11:04:35 AM	SiCl4 post valve closed
11/21/2011	11:04:35 AM	Bypass valve closed
11/21/2011	11:04:35 AM	Bubbler valve closed
11/21/2011	11:04:35 AM	Main Vac valve opened
11/21/2011	11:04:35 AM	Helium MFC set to  0.000000
11/21/2011	11:04:35 AM	H2 MFC set to  0.000000
11/21/2011	11:04:35 AM	BCl3 MFC set to  0.000000
11/21/2011	11:04:35 AM	PHl3 MFC set to  0.000000
11/21/2011	11:04:35 AM	SiCl4 MFC set to  0.000000
11/21/2011	11:04:35 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	11:04:35 AM	Tube furnace set to 50
11/21/2011	11:06:35 AM	Run finished at 11:06 AM
11/21/2011	11:11:28 AM	Main Vac valve closed
11/21/2011	11:11:52 AM	Main Vac valve opened
11/21/2011	11:11:57 AM	Helium MFC set to  20.000000
11/21/2011	11:11:59 AM	Helium valve opened
11/21/2011	11:12:54 AM	Helium valve closed
11/21/2011	11:12:58 AM	Helium MFC set to  0.000000
11/21/2011	11:24:45 AM	Main Vac valve closed
11/21/2011	11:25:28 AM	Main Vac valve opened
11/21/2011	11:25:55 AM	Recipe started at 11:25 AM
11/21/2011	11:25:55 AM	Helium valve closed
11/21/2011	11:25:55 AM	H2 valve closed
11/21/2011	11:25:55 AM	BCl3 valve closed
11/21/2011	11:25:55 AM	PH3 valve closed
11/21/2011	11:25:55 AM	SiCl4 pre valve closed
11/21/2011	11:25:55 AM	SiCl4 post valve closed
11/21/2011	11:25:55 AM	Main Vac valve closed
11/21/2011	11:25:55 AM	Bypass valve closed
11/21/2011	11:25:55 AM	Bubbler valve closed
11/21/2011	11:25:55 AM	Helium MFC set to  0.000000
11/21/2011	11:25:55 AM	H2 MFC set to  0.000000
11/21/2011	11:25:55 AM	BCl3 MFC set to  0.000000
11/21/2011	11:25:55 AM	PHl3 MFC set to  0.000000
11/21/2011	11:25:55 AM	SiCl4 MFC set to  0.000000
11/21/2011	11:25:55 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	11:25:55 AM	Tube furnace set to 0
11/21/2011	11:25:58 AM	Helium valve closed
11/21/2011	11:25:58 AM	BCl3 valve closed
11/21/2011	11:25:58 AM	PH3 valve closed
11/21/2011	11:25:58 AM	SiCl4 pre valve closed
11/21/2011	11:25:58 AM	SiCl4 post valve closed
11/21/2011	11:25:58 AM	Main Vac valve closed
11/21/2011	11:25:58 AM	Bypass valve closed
11/21/2011	11:25:58 AM	Bubbler valve closed
11/21/2011	11:25:58 AM	H2 valve opened
11/21/2011	11:25:58 AM	Helium MFC set to  0.000000
11/21/2011	11:25:58 AM	H2 MFC set to  500.000000
11/21/2011	11:25:58 AM	BCl3 MFC set to  0.000000
11/21/2011	11:25:58 AM	PHl3 MFC set to  0.000000
11/21/2011	11:25:58 AM	SiCl4 MFC set to  0.000000
11/21/2011	11:25:58 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	11:25:58 AM	Tube furnace set to 50
11/21/2011	11:27:04 AM	Helium valve closed
11/21/2011	11:27:04 AM	BCl3 valve closed
11/21/2011	11:27:04 AM	PH3 valve closed
11/21/2011	11:27:04 AM	SiCl4 pre valve closed
11/21/2011	11:27:04 AM	SiCl4 post valve closed
11/21/2011	11:27:04 AM	Main Vac valve closed
11/21/2011	11:27:04 AM	Bypass valve closed
11/21/2011	11:27:04 AM	H2 valve opened
11/21/2011	11:27:04 AM	Bubbler valve opened
11/21/2011	11:27:04 AM	Helium MFC set to  0.000000
11/21/2011	11:27:04 AM	H2 MFC set to  500.000000
11/21/2011	11:27:04 AM	BCl3 MFC set to  0.000000
11/21/2011	11:27:04 AM	PHl3 MFC set to  0.000000
11/21/2011	11:27:04 AM	SiCl4 MFC set to  0.000000
11/21/2011	11:27:04 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	11:27:04 AM	Tube furnace set to 50
11/21/2011	11:27:05 AM	Helium valve closed
11/21/2011	11:27:05 AM	BCl3 valve closed
11/21/2011	11:27:05 AM	PH3 valve closed
11/21/2011	11:27:05 AM	SiCl4 pre valve closed
11/21/2011	11:27:05 AM	SiCl4 post valve closed
11/21/2011	11:27:05 AM	Main Vac valve closed
11/21/2011	11:27:05 AM	Bypass valve closed
11/21/2011	11:27:05 AM	H2 valve opened
11/21/2011	11:27:05 AM	Bubbler valve opened
11/21/2011	11:27:05 AM	Helium MFC set to  0.000000
11/21/2011	11:27:05 AM	H2 MFC set to  450.000000
11/21/2011	11:27:05 AM	BCl3 MFC set to  0.000000
11/21/2011	11:27:05 AM	PHl3 MFC set to  0.000000
11/21/2011	11:27:05 AM	SiCl4 MFC set to  0.000000
11/21/2011	11:27:05 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	11:27:06 AM	Tube furnace set to 1000
11/21/2011	11:50:05 AM	Helium valve closed
11/21/2011	11:50:05 AM	PH3 valve closed
11/21/2011	11:50:05 AM	Main Vac valve closed
11/21/2011	11:50:05 AM	Bypass valve closed
11/21/2011	11:50:05 AM	H2 valve opened
11/21/2011	11:50:05 AM	BCl3 valve opened
11/21/2011	11:50:05 AM	SiCl4 pre valve opened
11/21/2011	11:50:05 AM	SiCl4 post valve opened
11/21/2011	11:50:05 AM	Bubbler valve opened
11/21/2011	11:50:05 AM	Helium MFC set to  0.000000
11/21/2011	11:50:05 AM	H2 MFC set to  495.000000
11/21/2011	11:50:05 AM	BCl3 MFC set to  0.800000
11/21/2011	11:50:06 AM	PHl3 MFC set to  0.000000
11/21/2011	11:50:06 AM	SiCl4 MFC set to  25.000000
11/21/2011	11:50:06 AM	Bypass solenoid MFC set to  0.000000
11/21/2011	11:50:06 AM	Tube furnace set to 1000
11/21/2011	12:12:06 PM	Helium valve closed
11/21/2011	12:12:06 PM	BCl3 valve closed
11/21/2011	12:12:06 PM	PH3 valve closed
11/21/2011	12:12:06 PM	SiCl4 pre valve closed
11/21/2011	12:12:06 PM	SiCl4 post valve closed
11/21/2011	12:12:06 PM	Main Vac valve closed
11/21/2011	12:12:06 PM	Bypass valve closed
11/21/2011	12:12:06 PM	H2 valve opened
11/21/2011	12:12:06 PM	Bubbler valve opened
11/21/2011	12:12:06 PM	Helium MFC set to  0.000000
11/21/2011	12:12:06 PM	H2 MFC set to  500.000000
11/21/2011	12:12:06 PM	BCl3 MFC set to  0.000000
11/21/2011	12:12:06 PM	PHl3 MFC set to  0.000000
11/21/2011	12:12:06 PM	SiCl4 MFC set to  0.000000
11/21/2011	12:12:06 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	12:12:06 PM	Tube furnace set to 750
11/21/2011	12:22:06 PM	H2 valve closed
11/21/2011	12:22:06 PM	BCl3 valve closed
11/21/2011	12:22:06 PM	PH3 valve closed
11/21/2011	12:22:06 PM	SiCl4 pre valve closed
11/21/2011	12:22:06 PM	SiCl4 post valve closed
11/21/2011	12:22:06 PM	Main Vac valve closed
11/21/2011	12:22:06 PM	Bypass valve closed
11/21/2011	12:22:06 PM	Helium valve opened
11/21/2011	12:22:06 PM	Bubbler valve opened
11/21/2011	12:22:06 PM	Helium MFC set to  400.000000
11/21/2011	12:22:06 PM	H2 MFC set to  0.000000
11/21/2011	12:22:06 PM	BCl3 MFC set to  0.000000
11/21/2011	12:22:06 PM	PHl3 MFC set to  0.000000
11/21/2011	12:22:06 PM	SiCl4 MFC set to  0.000000
11/21/2011	12:22:06 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	12:22:06 PM	Tube furnace set to 0
11/21/2011	12:47:06 PM	Helium valve closed
11/21/2011	12:47:06 PM	H2 valve closed
11/21/2011	12:47:06 PM	BCl3 valve closed
11/21/2011	12:47:06 PM	PH3 valve closed
11/21/2011	12:47:06 PM	SiCl4 pre valve closed
11/21/2011	12:47:06 PM	SiCl4 post valve closed
11/21/2011	12:47:06 PM	Main Vac valve closed
11/21/2011	12:47:06 PM	Bypass valve closed
11/21/2011	12:47:06 PM	Bubbler valve closed
11/21/2011	12:47:06 PM	Helium MFC set to  0.000000
11/21/2011	12:47:06 PM	H2 MFC set to  0.000000
11/21/2011	12:47:06 PM	BCl3 MFC set to  0.000000
11/21/2011	12:47:06 PM	PHl3 MFC set to  0.000000
11/21/2011	12:47:06 PM	SiCl4 MFC set to  0.000000
11/21/2011	12:47:06 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	12:47:06 PM	Tube furnace set to 50
11/21/2011	12:52:06 PM	Helium valve closed
11/21/2011	12:52:06 PM	H2 valve closed
11/21/2011	12:52:06 PM	BCl3 valve closed
11/21/2011	12:52:06 PM	PH3 valve closed
11/21/2011	12:52:06 PM	SiCl4 pre valve closed
11/21/2011	12:52:06 PM	SiCl4 post valve closed
11/21/2011	12:52:06 PM	Main Vac valve closed
11/21/2011	12:52:06 PM	Bubbler valve closed
11/21/2011	12:52:06 PM	Bypass valve opened
11/21/2011	12:52:06 PM	Helium MFC set to  0.000000
11/21/2011	12:52:06 PM	H2 MFC set to  0.000000
11/21/2011	12:52:06 PM	BCl3 MFC set to  0.000000
11/21/2011	12:52:06 PM	PHl3 MFC set to  0.000000
11/21/2011	12:52:06 PM	SiCl4 MFC set to  0.000000
11/21/2011	12:52:06 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	12:52:06 PM	Tube furnace set to 0
11/21/2011	12:57:06 PM	Helium valve closed
11/21/2011	12:57:06 PM	H2 valve closed
11/21/2011	12:57:06 PM	BCl3 valve closed
11/21/2011	12:57:06 PM	PH3 valve closed
11/21/2011	12:57:06 PM	SiCl4 pre valve closed
11/21/2011	12:57:06 PM	SiCl4 post valve closed
11/21/2011	12:57:06 PM	Bypass valve closed
11/21/2011	12:57:06 PM	Bubbler valve closed
11/21/2011	12:57:06 PM	Main Vac valve opened
11/21/2011	12:57:06 PM	Helium MFC set to  0.000000
11/21/2011	12:57:06 PM	H2 MFC set to  0.000000
11/21/2011	12:57:06 PM	BCl3 MFC set to  0.000000
11/21/2011	12:57:06 PM	PHl3 MFC set to  0.000000
11/21/2011	12:57:06 PM	SiCl4 MFC set to  0.000000
11/21/2011	12:57:06 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	12:57:06 PM	Tube furnace set to 0
11/21/2011	12:57:07 PM	Run finished at 12:57 PM
11/21/2011	2:15:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2011	2:15:08 PM	Recipe started at 2:15 PM
11/21/2011	2:15:08 PM	Helium valve closed
11/21/2011	2:15:08 PM	H2 valve closed
11/21/2011	2:15:08 PM	BCl3 valve closed
11/21/2011	2:15:08 PM	PH3 valve closed
11/21/2011	2:15:08 PM	SiCl4 pre valve closed
11/21/2011	2:15:08 PM	SiCl4 post valve closed
11/21/2011	2:15:08 PM	Main Vac valve closed
11/21/2011	2:15:08 PM	Bypass valve closed
11/21/2011	2:15:08 PM	Bubbler valve closed
11/21/2011	2:15:08 PM	Helium MFC set to  0.000000
11/21/2011	2:15:08 PM	H2 MFC set to  0.000000
11/21/2011	2:15:08 PM	BCl3 MFC set to  0.000000
11/21/2011	2:15:08 PM	PHl3 MFC set to  0.000000
11/21/2011	2:15:08 PM	SiCl4 MFC set to  0.000000
11/21/2011	2:15:08 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	2:15:09 PM	Tube furnace set to 0
11/21/2011	2:15:12 PM	H2 valve closed
11/21/2011	2:15:12 PM	BCl3 valve closed
11/21/2011	2:15:12 PM	PH3 valve closed
11/21/2011	2:15:12 PM	SiCl4 pre valve closed
11/21/2011	2:15:12 PM	SiCl4 post valve closed
11/21/2011	2:15:12 PM	Main Vac valve closed
11/21/2011	2:15:12 PM	Bypass valve closed
11/21/2011	2:15:12 PM	Bubbler valve closed
11/21/2011	2:15:12 PM	Helium valve opened
11/21/2011	2:15:12 PM	Helium MFC set to  500.000000
11/21/2011	2:15:12 PM	H2 MFC set to  0.000000
11/21/2011	2:15:12 PM	BCl3 MFC set to  0.000000
11/21/2011	2:15:12 PM	PHl3 MFC set to  0.000000
11/21/2011	2:15:12 PM	SiCl4 MFC set to  0.000000
11/21/2011	2:15:12 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	2:15:12 PM	Tube furnace set to 0
11/21/2011	2:16:17 PM	Helium valve closed
11/21/2011	2:16:17 PM	H2 valve closed
11/21/2011	2:16:17 PM	BCl3 valve closed
11/21/2011	2:16:17 PM	PH3 valve closed
11/21/2011	2:16:17 PM	SiCl4 pre valve closed
11/21/2011	2:16:17 PM	SiCl4 post valve closed
11/21/2011	2:16:17 PM	Main Vac valve closed
11/21/2011	2:16:17 PM	Bypass valve closed
11/21/2011	2:16:17 PM	Bubbler valve closed
11/21/2011	2:16:17 PM	Helium MFC set to  0.000000
11/21/2011	2:16:17 PM	H2 MFC set to  0.000000
11/21/2011	2:16:17 PM	BCl3 MFC set to  0.000000
11/21/2011	2:16:17 PM	PHl3 MFC set to  0.000000
11/21/2011	2:16:17 PM	SiCl4 MFC set to  0.000000
11/21/2011	2:16:17 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	2:16:17 PM	Tube furnace set to 0
11/21/2011	2:16:18 PM	Run finished at 2:16 PM
11/21/2011	2:16:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2011	2:19:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2011	2:19:33 PM	Recipe started at 2:19 PM
11/21/2011	2:19:33 PM	Helium valve closed
11/21/2011	2:19:33 PM	H2 valve closed
11/21/2011	2:19:33 PM	BCl3 valve closed
11/21/2011	2:19:33 PM	PH3 valve closed
11/21/2011	2:19:33 PM	SiCl4 pre valve closed
11/21/2011	2:19:33 PM	SiCl4 post valve closed
11/21/2011	2:19:33 PM	Main Vac valve closed
11/21/2011	2:19:33 PM	Bubbler valve closed
11/21/2011	2:19:33 PM	Bypass valve opened
11/21/2011	2:19:33 PM	Helium MFC set to  0.000000
11/21/2011	2:19:33 PM	H2 MFC set to  0.000000
11/21/2011	2:19:33 PM	BCl3 MFC set to  0.000000
11/21/2011	2:19:33 PM	PHl3 MFC set to  0.000000
11/21/2011	2:19:33 PM	SiCl4 MFC set to  0.000000
11/21/2011	2:19:33 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	2:19:33 PM	Tube furnace set to 0
11/21/2011	2:21:20 PM	Helium valve closed
11/21/2011	2:21:20 PM	H2 valve closed
11/21/2011	2:21:20 PM	BCl3 valve closed
11/21/2011	2:21:20 PM	PH3 valve closed
11/21/2011	2:21:20 PM	SiCl4 pre valve closed
11/21/2011	2:21:20 PM	SiCl4 post valve closed
11/21/2011	2:21:20 PM	Main Vac valve closed
11/21/2011	2:21:20 PM	Bubbler valve closed
11/21/2011	2:21:20 PM	Bypass valve opened
11/21/2011	2:21:20 PM	Helium MFC set to  0.000000
11/21/2011	2:21:20 PM	H2 MFC set to  0.000000
11/21/2011	2:21:20 PM	BCl3 MFC set to  0.000000
11/21/2011	2:21:20 PM	PHl3 MFC set to  0.000000
11/21/2011	2:21:20 PM	SiCl4 MFC set to  0.000000
11/21/2011	2:21:20 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	2:21:20 PM	Tube furnace set to 0
11/21/2011	2:22:20 PM	Helium valve closed
11/21/2011	2:22:20 PM	H2 valve closed
11/21/2011	2:22:20 PM	BCl3 valve closed
11/21/2011	2:22:20 PM	PH3 valve closed
11/21/2011	2:22:20 PM	SiCl4 pre valve closed
11/21/2011	2:22:20 PM	SiCl4 post valve closed
11/21/2011	2:22:20 PM	Bypass valve closed
11/21/2011	2:22:20 PM	Bubbler valve closed
11/21/2011	2:22:20 PM	Main Vac valve opened
11/21/2011	2:22:20 PM	Helium MFC set to  0.000000
11/21/2011	2:22:20 PM	H2 MFC set to  0.000000
11/21/2011	2:22:20 PM	BCl3 MFC set to  0.000000
11/21/2011	2:22:20 PM	PHl3 MFC set to  0.000000
11/21/2011	2:22:20 PM	SiCl4 MFC set to  0.000000
11/21/2011	2:22:20 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	2:22:21 PM	Tube furnace set to 0
11/21/2011	2:22:22 PM	Run finished at 2:22 PM
11/21/2011	2:22:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2011	3:45:01 PM	Main Vac valve closed
11/21/2011	3:45:16 PM	Tube furnace set to 50
11/21/2011	3:45:38 PM	Main Vac valve opened
11/21/2011	3:47:23 PM	Recipe started at 3:47 PM
11/21/2011	3:47:23 PM	Helium valve closed
11/21/2011	3:47:23 PM	H2 valve closed
11/21/2011	3:47:23 PM	BCl3 valve closed
11/21/2011	3:47:23 PM	PH3 valve closed
11/21/2011	3:47:23 PM	SiCl4 pre valve closed
11/21/2011	3:47:23 PM	SiCl4 post valve closed
11/21/2011	3:47:23 PM	Main Vac valve closed
11/21/2011	3:47:23 PM	Bypass valve closed
11/21/2011	3:47:23 PM	Bubbler valve closed
11/21/2011	3:47:23 PM	Helium MFC set to  0.000000
11/21/2011	3:47:23 PM	H2 MFC set to  0.000000
11/21/2011	3:47:23 PM	BCl3 MFC set to  0.000000
11/21/2011	3:47:23 PM	PHl3 MFC set to  0.000000
11/21/2011	3:47:23 PM	SiCl4 MFC set to  0.000000
11/21/2011	3:47:23 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	3:47:23 PM	Tube furnace set to 0
11/21/2011	3:47:26 PM	Helium valve closed
11/21/2011	3:47:26 PM	BCl3 valve closed
11/21/2011	3:47:26 PM	PH3 valve closed
11/21/2011	3:47:26 PM	SiCl4 pre valve closed
11/21/2011	3:47:26 PM	SiCl4 post valve closed
11/21/2011	3:47:26 PM	Main Vac valve closed
11/21/2011	3:47:26 PM	Bypass valve closed
11/21/2011	3:47:26 PM	Bubbler valve closed
11/21/2011	3:47:26 PM	H2 valve opened
11/21/2011	3:47:26 PM	Helium MFC set to  0.000000
11/21/2011	3:47:26 PM	H2 MFC set to  500.000000
11/21/2011	3:47:26 PM	BCl3 MFC set to  0.000000
11/21/2011	3:47:26 PM	PHl3 MFC set to  0.000000
11/21/2011	3:47:26 PM	SiCl4 MFC set to  0.000000
11/21/2011	3:47:26 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	3:47:27 PM	Tube furnace set to 50
11/21/2011	3:48:34 PM	Helium valve closed
11/21/2011	3:48:34 PM	BCl3 valve closed
11/21/2011	3:48:34 PM	PH3 valve closed
11/21/2011	3:48:34 PM	SiCl4 pre valve closed
11/21/2011	3:48:34 PM	SiCl4 post valve closed
11/21/2011	3:48:34 PM	Main Vac valve closed
11/21/2011	3:48:34 PM	Bypass valve closed
11/21/2011	3:48:34 PM	H2 valve opened
11/21/2011	3:48:34 PM	Bubbler valve opened
11/21/2011	3:48:34 PM	Helium MFC set to  0.000000
11/21/2011	3:48:34 PM	H2 MFC set to  500.000000
11/21/2011	3:48:34 PM	BCl3 MFC set to  0.000000
11/21/2011	3:48:34 PM	PHl3 MFC set to  0.000000
11/21/2011	3:48:34 PM	SiCl4 MFC set to  0.000000
11/21/2011	3:48:34 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	3:48:34 PM	Tube furnace set to 50
11/21/2011	3:48:35 PM	Helium valve closed
11/21/2011	3:48:35 PM	BCl3 valve closed
11/21/2011	3:48:35 PM	PH3 valve closed
11/21/2011	3:48:35 PM	SiCl4 pre valve closed
11/21/2011	3:48:35 PM	SiCl4 post valve closed
11/21/2011	3:48:35 PM	Main Vac valve closed
11/21/2011	3:48:35 PM	Bypass valve closed
11/21/2011	3:48:35 PM	H2 valve opened
11/21/2011	3:48:35 PM	Bubbler valve opened
11/21/2011	3:48:35 PM	Helium MFC set to  0.000000
11/21/2011	3:48:35 PM	H2 MFC set to  450.000000
11/21/2011	3:48:35 PM	BCl3 MFC set to  0.000000
11/21/2011	3:48:35 PM	PHl3 MFC set to  0.000000
11/21/2011	3:48:35 PM	SiCl4 MFC set to  0.000000
11/21/2011	3:48:35 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	3:48:35 PM	Tube furnace set to 1000
11/21/2011	4:11:35 PM	Helium valve closed
11/21/2011	4:11:35 PM	PH3 valve closed
11/21/2011	4:11:35 PM	Main Vac valve closed
11/21/2011	4:11:35 PM	Bypass valve closed
11/21/2011	4:11:35 PM	H2 valve opened
11/21/2011	4:11:35 PM	BCl3 valve opened
11/21/2011	4:11:35 PM	SiCl4 pre valve opened
11/21/2011	4:11:35 PM	SiCl4 post valve opened
11/21/2011	4:11:35 PM	Bubbler valve opened
11/21/2011	4:11:35 PM	Helium MFC set to  0.000000
11/21/2011	4:11:35 PM	H2 MFC set to  450.000000
11/21/2011	4:11:35 PM	BCl3 MFC set to  1.600000
11/21/2011	4:11:35 PM	PHl3 MFC set to  0.000000
11/21/2011	4:11:35 PM	SiCl4 MFC set to  50.000000
11/21/2011	4:11:35 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	4:11:35 PM	Tube furnace set to 1000
11/21/2011	4:33:35 PM	Helium valve closed
11/21/2011	4:33:35 PM	BCl3 valve closed
11/21/2011	4:33:35 PM	PH3 valve closed
11/21/2011	4:33:35 PM	SiCl4 pre valve closed
11/21/2011	4:33:35 PM	SiCl4 post valve closed
11/21/2011	4:33:35 PM	Main Vac valve closed
11/21/2011	4:33:35 PM	Bypass valve closed
11/21/2011	4:33:35 PM	H2 valve opened
11/21/2011	4:33:35 PM	Bubbler valve opened
11/21/2011	4:33:35 PM	Helium MFC set to  0.000000
11/21/2011	4:33:35 PM	H2 MFC set to  500.000000
11/21/2011	4:33:35 PM	BCl3 MFC set to  0.000000
11/21/2011	4:33:35 PM	PHl3 MFC set to  0.000000
11/21/2011	4:33:35 PM	SiCl4 MFC set to  0.000000
11/21/2011	4:33:35 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	4:33:35 PM	Tube furnace set to 750
11/21/2011	4:43:35 PM	H2 valve closed
11/21/2011	4:43:35 PM	BCl3 valve closed
11/21/2011	4:43:35 PM	PH3 valve closed
11/21/2011	4:43:35 PM	SiCl4 pre valve closed
11/21/2011	4:43:35 PM	SiCl4 post valve closed
11/21/2011	4:43:35 PM	Main Vac valve closed
11/21/2011	4:43:35 PM	Bypass valve closed
11/21/2011	4:43:35 PM	Helium valve opened
11/21/2011	4:43:35 PM	Bubbler valve opened
11/21/2011	4:43:35 PM	Helium MFC set to  400.000000
11/21/2011	4:43:35 PM	H2 MFC set to  0.000000
11/21/2011	4:43:35 PM	BCl3 MFC set to  0.000000
11/21/2011	4:43:35 PM	PHl3 MFC set to  0.000000
11/21/2011	4:43:35 PM	SiCl4 MFC set to  0.000000
11/21/2011	4:43:35 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	4:43:35 PM	Tube furnace set to 0
11/21/2011	5:08:35 PM	Helium valve closed
11/21/2011	5:08:35 PM	H2 valve closed
11/21/2011	5:08:35 PM	BCl3 valve closed
11/21/2011	5:08:35 PM	PH3 valve closed
11/21/2011	5:08:35 PM	SiCl4 pre valve closed
11/21/2011	5:08:35 PM	SiCl4 post valve closed
11/21/2011	5:08:35 PM	Main Vac valve closed
11/21/2011	5:08:35 PM	Bypass valve closed
11/21/2011	5:08:35 PM	Bubbler valve closed
11/21/2011	5:08:35 PM	Helium MFC set to  0.000000
11/21/2011	5:08:35 PM	H2 MFC set to  0.000000
11/21/2011	5:08:35 PM	BCl3 MFC set to  0.000000
11/21/2011	5:08:35 PM	PHl3 MFC set to  0.000000
11/21/2011	5:08:35 PM	SiCl4 MFC set to  0.000000
11/21/2011	5:08:35 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	5:08:36 PM	Tube furnace set to 50
11/21/2011	5:13:36 PM	Helium valve closed
11/21/2011	5:13:36 PM	H2 valve closed
11/21/2011	5:13:36 PM	BCl3 valve closed
11/21/2011	5:13:36 PM	PH3 valve closed
11/21/2011	5:13:36 PM	SiCl4 pre valve closed
11/21/2011	5:13:36 PM	SiCl4 post valve closed
11/21/2011	5:13:36 PM	Main Vac valve closed
11/21/2011	5:13:36 PM	Bubbler valve closed
11/21/2011	5:13:36 PM	Bypass valve opened
11/21/2011	5:13:36 PM	Helium MFC set to  0.000000
11/21/2011	5:13:36 PM	H2 MFC set to  0.000000
11/21/2011	5:13:36 PM	BCl3 MFC set to  0.000000
11/21/2011	5:13:36 PM	PHl3 MFC set to  0.000000
11/21/2011	5:13:36 PM	SiCl4 MFC set to  0.000000
11/21/2011	5:13:36 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	5:13:36 PM	Tube furnace set to 0
11/21/2011	5:18:36 PM	Helium valve closed
11/21/2011	5:18:36 PM	H2 valve closed
11/21/2011	5:18:36 PM	BCl3 valve closed
11/21/2011	5:18:36 PM	PH3 valve closed
11/21/2011	5:18:36 PM	SiCl4 pre valve closed
11/21/2011	5:18:36 PM	SiCl4 post valve closed
11/21/2011	5:18:36 PM	Bypass valve closed
11/21/2011	5:18:36 PM	Bubbler valve closed
11/21/2011	5:18:36 PM	Main Vac valve opened
11/21/2011	5:18:36 PM	Helium MFC set to  0.000000
11/21/2011	5:18:36 PM	H2 MFC set to  0.000000
11/21/2011	5:18:36 PM	BCl3 MFC set to  0.000000
11/21/2011	5:18:36 PM	PHl3 MFC set to  0.000000
11/21/2011	5:18:36 PM	SiCl4 MFC set to  0.000000
11/21/2011	5:18:36 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	5:18:36 PM	Tube furnace set to 0
11/21/2011	5:18:37 PM	Run finished at 5:18 PM
11/21/2011	5:32:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2011	5:32:53 PM	Recipe started at 5:32 PM
11/21/2011	5:32:53 PM	Helium valve closed
11/21/2011	5:32:53 PM	H2 valve closed
11/21/2011	5:32:53 PM	BCl3 valve closed
11/21/2011	5:32:53 PM	PH3 valve closed
11/21/2011	5:32:53 PM	SiCl4 pre valve closed
11/21/2011	5:32:53 PM	SiCl4 post valve closed
11/21/2011	5:32:53 PM	Main Vac valve closed
11/21/2011	5:32:53 PM	Bypass valve closed
11/21/2011	5:32:53 PM	Bubbler valve closed
11/21/2011	5:32:53 PM	Helium MFC set to  0.000000
11/21/2011	5:32:53 PM	H2 MFC set to  0.000000
11/21/2011	5:32:53 PM	BCl3 MFC set to  0.000000
11/21/2011	5:32:53 PM	PHl3 MFC set to  0.000000
11/21/2011	5:32:53 PM	SiCl4 MFC set to  0.000000
11/21/2011	5:32:53 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	5:32:54 PM	Tube furnace set to 0
11/21/2011	5:32:57 PM	H2 valve closed
11/21/2011	5:32:57 PM	BCl3 valve closed
11/21/2011	5:32:57 PM	PH3 valve closed
11/21/2011	5:32:57 PM	SiCl4 pre valve closed
11/21/2011	5:32:57 PM	SiCl4 post valve closed
11/21/2011	5:32:57 PM	Main Vac valve closed
11/21/2011	5:32:57 PM	Bypass valve closed
11/21/2011	5:32:57 PM	Bubbler valve closed
11/21/2011	5:32:57 PM	Helium valve opened
11/21/2011	5:32:57 PM	Helium MFC set to  500.000000
11/21/2011	5:32:57 PM	H2 MFC set to  0.000000
11/21/2011	5:32:57 PM	BCl3 MFC set to  0.000000
11/21/2011	5:32:57 PM	PHl3 MFC set to  0.000000
11/21/2011	5:32:57 PM	SiCl4 MFC set to  0.000000
11/21/2011	5:32:57 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	5:32:57 PM	Tube furnace set to 0
11/21/2011	5:34:00 PM	Helium valve closed
11/21/2011	5:34:00 PM	H2 valve closed
11/21/2011	5:34:00 PM	BCl3 valve closed
11/21/2011	5:34:00 PM	PH3 valve closed
11/21/2011	5:34:00 PM	SiCl4 pre valve closed
11/21/2011	5:34:00 PM	SiCl4 post valve closed
11/21/2011	5:34:00 PM	Main Vac valve closed
11/21/2011	5:34:00 PM	Bypass valve closed
11/21/2011	5:34:00 PM	Bubbler valve closed
11/21/2011	5:34:00 PM	Helium MFC set to  0.000000
11/21/2011	5:34:00 PM	H2 MFC set to  0.000000
11/21/2011	5:34:00 PM	BCl3 MFC set to  0.000000
11/21/2011	5:34:00 PM	PHl3 MFC set to  0.000000
11/21/2011	5:34:00 PM	SiCl4 MFC set to  0.000000
11/21/2011	5:34:00 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	5:34:00 PM	Tube furnace set to 0
11/21/2011	5:34:01 PM	Run finished at 5:34 PM
11/21/2011	5:34:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2011	5:35:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2011	5:35:58 PM	Recipe started at 5:35 PM
11/21/2011	5:35:58 PM	Helium valve closed
11/21/2011	5:35:58 PM	H2 valve closed
11/21/2011	5:35:58 PM	BCl3 valve closed
11/21/2011	5:35:58 PM	PH3 valve closed
11/21/2011	5:35:58 PM	SiCl4 pre valve closed
11/21/2011	5:35:58 PM	SiCl4 post valve closed
11/21/2011	5:35:58 PM	Main Vac valve closed
11/21/2011	5:35:58 PM	Bubbler valve closed
11/21/2011	5:35:58 PM	Bypass valve opened
11/21/2011	5:35:58 PM	Helium MFC set to  0.000000
11/21/2011	5:35:58 PM	H2 MFC set to  0.000000
11/21/2011	5:35:58 PM	BCl3 MFC set to  0.000000
11/21/2011	5:35:58 PM	PHl3 MFC set to  0.000000
11/21/2011	5:35:58 PM	SiCl4 MFC set to  0.000000
11/21/2011	5:35:58 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	5:35:58 PM	Tube furnace set to 0
11/21/2011	5:37:36 PM	Helium valve closed
11/21/2011	5:37:36 PM	H2 valve closed
11/21/2011	5:37:36 PM	BCl3 valve closed
11/21/2011	5:37:36 PM	PH3 valve closed
11/21/2011	5:37:37 PM	SiCl4 pre valve closed
11/21/2011	5:37:37 PM	SiCl4 post valve closed
11/21/2011	5:37:37 PM	Main Vac valve closed
11/21/2011	5:37:37 PM	Bubbler valve closed
11/21/2011	5:37:37 PM	Bypass valve opened
11/21/2011	5:37:37 PM	Helium MFC set to  0.000000
11/21/2011	5:37:37 PM	H2 MFC set to  0.000000
11/21/2011	5:37:37 PM	BCl3 MFC set to  0.000000
11/21/2011	5:37:37 PM	PHl3 MFC set to  0.000000
11/21/2011	5:37:37 PM	SiCl4 MFC set to  0.000000
11/21/2011	5:37:37 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	5:37:37 PM	Tube furnace set to 0
11/21/2011	5:38:37 PM	Helium valve closed
11/21/2011	5:38:37 PM	H2 valve closed
11/21/2011	5:38:37 PM	BCl3 valve closed
11/21/2011	5:38:37 PM	PH3 valve closed
11/21/2011	5:38:37 PM	SiCl4 pre valve closed
11/21/2011	5:38:37 PM	SiCl4 post valve closed
11/21/2011	5:38:37 PM	Bypass valve closed
11/21/2011	5:38:37 PM	Bubbler valve closed
11/21/2011	5:38:37 PM	Main Vac valve opened
11/21/2011	5:38:37 PM	Helium MFC set to  0.000000
11/21/2011	5:38:37 PM	H2 MFC set to  0.000000
11/21/2011	5:38:37 PM	BCl3 MFC set to  0.000000
11/21/2011	5:38:37 PM	PHl3 MFC set to  0.000000
11/21/2011	5:38:37 PM	SiCl4 MFC set to  0.000000
11/21/2011	5:38:37 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	5:38:37 PM	Tube furnace set to 0
11/21/2011	5:38:38 PM	Run finished at 5:38 PM
11/21/2011	5:38:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2011	9:15:20 PM	Tube furnace set to 50
11/21/2011	9:15:50 PM	Main Vac valve closed
11/21/2011	9:16:54 PM	Main Vac valve opened
11/21/2011	9:20:02 PM	Recipe started at 9:20 PM
11/21/2011	9:20:02 PM	Helium valve closed
11/21/2011	9:20:02 PM	H2 valve closed
11/21/2011	9:20:02 PM	BCl3 valve closed
11/21/2011	9:20:02 PM	PH3 valve closed
11/21/2011	9:20:02 PM	SiCl4 pre valve closed
11/21/2011	9:20:02 PM	SiCl4 post valve closed
11/21/2011	9:20:02 PM	Main Vac valve closed
11/21/2011	9:20:02 PM	Bypass valve closed
11/21/2011	9:20:02 PM	Bubbler valve closed
11/21/2011	9:20:02 PM	Helium MFC set to  0.000000
11/21/2011	9:20:02 PM	H2 MFC set to  0.000000
11/21/2011	9:20:02 PM	BCl3 MFC set to  0.000000
11/21/2011	9:20:02 PM	PHl3 MFC set to  0.000000
11/21/2011	9:20:02 PM	SiCl4 MFC set to  0.000000
11/21/2011	9:20:02 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:20:02 PM	Tube furnace set to 0
11/21/2011	9:20:05 PM	Helium valve closed
11/21/2011	9:20:05 PM	BCl3 valve closed
11/21/2011	9:20:05 PM	PH3 valve closed
11/21/2011	9:20:05 PM	SiCl4 pre valve closed
11/21/2011	9:20:05 PM	SiCl4 post valve closed
11/21/2011	9:20:05 PM	Main Vac valve closed
11/21/2011	9:20:05 PM	Bypass valve closed
11/21/2011	9:20:05 PM	Bubbler valve closed
11/21/2011	9:20:05 PM	H2 valve opened
11/21/2011	9:20:05 PM	Helium MFC set to  0.000000
11/21/2011	9:20:05 PM	H2 MFC set to  500.000000
11/21/2011	9:20:05 PM	BCl3 MFC set to  0.000000
11/21/2011	9:20:05 PM	PHl3 MFC set to  0.000000
11/21/2011	9:20:05 PM	SiCl4 MFC set to  0.000000
11/21/2011	9:20:05 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:20:05 PM	Tube furnace set to 50
11/21/2011	9:21:12 PM	Helium valve closed
11/21/2011	9:21:12 PM	BCl3 valve closed
11/21/2011	9:21:12 PM	PH3 valve closed
11/21/2011	9:21:12 PM	SiCl4 pre valve closed
11/21/2011	9:21:12 PM	SiCl4 post valve closed
11/21/2011	9:21:12 PM	Main Vac valve closed
11/21/2011	9:21:12 PM	Bypass valve closed
11/21/2011	9:21:12 PM	H2 valve opened
11/21/2011	9:21:12 PM	Bubbler valve opened
11/21/2011	9:21:12 PM	Helium MFC set to  0.000000
11/21/2011	9:21:12 PM	H2 MFC set to  500.000000
11/21/2011	9:21:12 PM	BCl3 MFC set to  0.000000
11/21/2011	9:21:12 PM	PHl3 MFC set to  0.000000
11/21/2011	9:21:12 PM	SiCl4 MFC set to  0.000000
11/21/2011	9:21:12 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:21:12 PM	Tube furnace set to 50
11/21/2011	9:21:13 PM	Helium valve closed
11/21/2011	9:21:13 PM	BCl3 valve closed
11/21/2011	9:21:13 PM	PH3 valve closed
11/21/2011	9:21:13 PM	SiCl4 pre valve closed
11/21/2011	9:21:13 PM	SiCl4 post valve closed
11/21/2011	9:21:13 PM	Main Vac valve closed
11/21/2011	9:21:13 PM	Bypass valve closed
11/21/2011	9:21:13 PM	H2 valve opened
11/21/2011	9:21:13 PM	Bubbler valve opened
11/21/2011	9:21:13 PM	Helium MFC set to  0.000000
11/21/2011	9:21:13 PM	H2 MFC set to  450.000000
11/21/2011	9:21:13 PM	BCl3 MFC set to  0.000000
11/21/2011	9:21:13 PM	PHl3 MFC set to  0.000000
11/21/2011	9:21:13 PM	SiCl4 MFC set to  0.000000
11/21/2011	9:21:13 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:21:13 PM	Tube furnace set to 1000
11/21/2011	9:44:13 PM	Helium valve closed
11/21/2011	9:44:13 PM	PH3 valve closed
11/21/2011	9:44:13 PM	Main Vac valve closed
11/21/2011	9:44:13 PM	Bypass valve closed
11/21/2011	9:44:13 PM	H2 valve opened
11/21/2011	9:44:13 PM	BCl3 valve opened
11/21/2011	9:44:13 PM	SiCl4 pre valve opened
11/21/2011	9:44:13 PM	SiCl4 post valve opened
11/21/2011	9:44:13 PM	Bubbler valve opened
11/21/2011	9:44:13 PM	Helium MFC set to  0.000000
11/21/2011	9:44:13 PM	H2 MFC set to  450.000000
11/21/2011	9:44:13 PM	BCl3 MFC set to  1.400000
11/21/2011	9:44:13 PM	PHl3 MFC set to  0.000000
11/21/2011	9:44:13 PM	SiCl4 MFC set to  50.000000
11/21/2011	9:44:13 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	9:44:13 PM	Tube furnace set to 1000
11/21/2011	10:08:13 PM	Helium valve closed
11/21/2011	10:08:13 PM	BCl3 valve closed
11/21/2011	10:08:13 PM	PH3 valve closed
11/21/2011	10:08:13 PM	SiCl4 pre valve closed
11/21/2011	10:08:13 PM	SiCl4 post valve closed
11/21/2011	10:08:13 PM	Main Vac valve closed
11/21/2011	10:08:13 PM	Bypass valve closed
11/21/2011	10:08:13 PM	H2 valve opened
11/21/2011	10:08:13 PM	Bubbler valve opened
11/21/2011	10:08:13 PM	Helium MFC set to  0.000000
11/21/2011	10:08:13 PM	H2 MFC set to  500.000000
11/21/2011	10:08:13 PM	BCl3 MFC set to  0.000000
11/21/2011	10:08:13 PM	PHl3 MFC set to  0.000000
11/21/2011	10:08:13 PM	SiCl4 MFC set to  0.000000
11/21/2011	10:08:13 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:08:13 PM	Tube furnace set to 750
11/21/2011	10:18:13 PM	H2 valve closed
11/21/2011	10:18:13 PM	BCl3 valve closed
11/21/2011	10:18:13 PM	PH3 valve closed
11/21/2011	10:18:13 PM	SiCl4 pre valve closed
11/21/2011	10:18:13 PM	SiCl4 post valve closed
11/21/2011	10:18:13 PM	Main Vac valve closed
11/21/2011	10:18:13 PM	Bypass valve closed
11/21/2011	10:18:13 PM	Helium valve opened
11/21/2011	10:18:13 PM	Bubbler valve opened
11/21/2011	10:18:13 PM	Helium MFC set to  400.000000
11/21/2011	10:18:13 PM	H2 MFC set to  0.000000
11/21/2011	10:18:13 PM	BCl3 MFC set to  0.000000
11/21/2011	10:18:13 PM	PHl3 MFC set to  0.000000
11/21/2011	10:18:13 PM	SiCl4 MFC set to  0.000000
11/21/2011	10:18:14 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:18:14 PM	Tube furnace set to 0
11/21/2011	10:43:14 PM	Helium valve closed
11/21/2011	10:43:14 PM	H2 valve closed
11/21/2011	10:43:14 PM	BCl3 valve closed
11/21/2011	10:43:14 PM	PH3 valve closed
11/21/2011	10:43:14 PM	SiCl4 pre valve closed
11/21/2011	10:43:14 PM	SiCl4 post valve closed
11/21/2011	10:43:14 PM	Main Vac valve closed
11/21/2011	10:43:14 PM	Bypass valve closed
11/21/2011	10:43:14 PM	Bubbler valve closed
11/21/2011	10:43:14 PM	Helium MFC set to  0.000000
11/21/2011	10:43:14 PM	H2 MFC set to  0.000000
11/21/2011	10:43:14 PM	BCl3 MFC set to  0.000000
11/21/2011	10:43:14 PM	PHl3 MFC set to  0.000000
11/21/2011	10:43:14 PM	SiCl4 MFC set to  0.000000
11/21/2011	10:43:14 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:43:14 PM	Tube furnace set to 50
11/21/2011	10:48:14 PM	Helium valve closed
11/21/2011	10:48:14 PM	H2 valve closed
11/21/2011	10:48:14 PM	BCl3 valve closed
11/21/2011	10:48:14 PM	PH3 valve closed
11/21/2011	10:48:14 PM	SiCl4 pre valve closed
11/21/2011	10:48:14 PM	SiCl4 post valve closed
11/21/2011	10:48:14 PM	Main Vac valve closed
11/21/2011	10:48:14 PM	Bubbler valve closed
11/21/2011	10:48:14 PM	Bypass valve opened
11/21/2011	10:48:14 PM	Helium MFC set to  0.000000
11/21/2011	10:48:14 PM	H2 MFC set to  0.000000
11/21/2011	10:48:14 PM	BCl3 MFC set to  0.000000
11/21/2011	10:48:14 PM	PHl3 MFC set to  0.000000
11/21/2011	10:48:14 PM	SiCl4 MFC set to  0.000000
11/21/2011	10:48:14 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:48:14 PM	Tube furnace set to 0
11/21/2011	10:53:14 PM	Helium valve closed
11/21/2011	10:53:14 PM	H2 valve closed
11/21/2011	10:53:14 PM	BCl3 valve closed
11/21/2011	10:53:14 PM	PH3 valve closed
11/21/2011	10:53:14 PM	SiCl4 pre valve closed
11/21/2011	10:53:14 PM	SiCl4 post valve closed
11/21/2011	10:53:14 PM	Bypass valve closed
11/21/2011	10:53:14 PM	Bubbler valve closed
11/21/2011	10:53:14 PM	Main Vac valve opened
11/21/2011	10:53:14 PM	Helium MFC set to  0.000000
11/21/2011	10:53:14 PM	H2 MFC set to  0.000000
11/21/2011	10:53:14 PM	BCl3 MFC set to  0.000000
11/21/2011	10:53:14 PM	PHl3 MFC set to  0.000000
11/21/2011	10:53:14 PM	SiCl4 MFC set to  0.000000
11/21/2011	10:53:14 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:53:14 PM	Tube furnace set to 0
11/21/2011	10:53:15 PM	Run finished at 10:53 PM
11/21/2011	10:55:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2011	10:55:50 PM	Recipe started at 10:55 PM
11/21/2011	10:55:50 PM	Helium valve closed
11/21/2011	10:55:50 PM	H2 valve closed
11/21/2011	10:55:50 PM	BCl3 valve closed
11/21/2011	10:55:50 PM	PH3 valve closed
11/21/2011	10:55:50 PM	SiCl4 pre valve closed
11/21/2011	10:55:50 PM	SiCl4 post valve closed
11/21/2011	10:55:50 PM	Main Vac valve closed
11/21/2011	10:55:50 PM	Bypass valve closed
11/21/2011	10:55:50 PM	Bubbler valve closed
11/21/2011	10:55:50 PM	Helium MFC set to  0.000000
11/21/2011	10:55:50 PM	H2 MFC set to  0.000000
11/21/2011	10:55:50 PM	BCl3 MFC set to  0.000000
11/21/2011	10:55:50 PM	PHl3 MFC set to  0.000000
11/21/2011	10:55:50 PM	SiCl4 MFC set to  0.000000
11/21/2011	10:55:50 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:55:50 PM	Tube furnace set to 0
11/21/2011	10:55:53 PM	H2 valve closed
11/21/2011	10:55:53 PM	BCl3 valve closed
11/21/2011	10:55:53 PM	PH3 valve closed
11/21/2011	10:55:53 PM	SiCl4 pre valve closed
11/21/2011	10:55:53 PM	SiCl4 post valve closed
11/21/2011	10:55:53 PM	Main Vac valve closed
11/21/2011	10:55:53 PM	Bypass valve closed
11/21/2011	10:55:53 PM	Bubbler valve closed
11/21/2011	10:55:53 PM	Helium valve opened
11/21/2011	10:55:53 PM	Helium MFC set to  500.000000
11/21/2011	10:55:53 PM	H2 MFC set to  0.000000
11/21/2011	10:55:53 PM	BCl3 MFC set to  0.000000
11/21/2011	10:55:53 PM	PHl3 MFC set to  0.000000
11/21/2011	10:55:53 PM	SiCl4 MFC set to  0.000000
11/21/2011	10:55:53 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:55:53 PM	Tube furnace set to 0
11/21/2011	10:56:56 PM	Helium valve closed
11/21/2011	10:56:56 PM	H2 valve closed
11/21/2011	10:56:56 PM	BCl3 valve closed
11/21/2011	10:56:56 PM	PH3 valve closed
11/21/2011	10:56:56 PM	SiCl4 pre valve closed
11/21/2011	10:56:56 PM	SiCl4 post valve closed
11/21/2011	10:56:56 PM	Main Vac valve closed
11/21/2011	10:56:56 PM	Bypass valve closed
11/21/2011	10:56:56 PM	Bubbler valve closed
11/21/2011	10:56:56 PM	Helium MFC set to  0.000000
11/21/2011	10:56:56 PM	H2 MFC set to  0.000000
11/21/2011	10:56:56 PM	BCl3 MFC set to  0.000000
11/21/2011	10:56:56 PM	PHl3 MFC set to  0.000000
11/21/2011	10:56:56 PM	SiCl4 MFC set to  0.000000
11/21/2011	10:56:56 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:56:57 PM	Tube furnace set to 0
11/21/2011	10:56:58 PM	Run finished at 10:56 PM
11/21/2011	10:56:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2011	10:58:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2011	10:58:31 PM	Recipe started at 10:58 PM
11/21/2011	10:58:31 PM	Helium valve closed
11/21/2011	10:58:31 PM	H2 valve closed
11/21/2011	10:58:31 PM	BCl3 valve closed
11/21/2011	10:58:31 PM	PH3 valve closed
11/21/2011	10:58:31 PM	SiCl4 pre valve closed
11/21/2011	10:58:31 PM	SiCl4 post valve closed
11/21/2011	10:58:31 PM	Main Vac valve closed
11/21/2011	10:58:31 PM	Bubbler valve closed
11/21/2011	10:58:31 PM	Bypass valve opened
11/21/2011	10:58:31 PM	Helium MFC set to  0.000000
11/21/2011	10:58:31 PM	H2 MFC set to  0.000000
11/21/2011	10:58:31 PM	BCl3 MFC set to  0.000000
11/21/2011	10:58:31 PM	PHl3 MFC set to  0.000000
11/21/2011	10:58:31 PM	SiCl4 MFC set to  0.000000
11/21/2011	10:58:31 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:58:31 PM	Tube furnace set to 0
11/21/2011	10:59:34 PM	Helium valve closed
11/21/2011	10:59:34 PM	H2 valve closed
11/21/2011	10:59:34 PM	BCl3 valve closed
11/21/2011	10:59:34 PM	PH3 valve closed
11/21/2011	10:59:34 PM	SiCl4 pre valve closed
11/21/2011	10:59:34 PM	SiCl4 post valve closed
11/21/2011	10:59:34 PM	Main Vac valve closed
11/21/2011	10:59:34 PM	Bubbler valve closed
11/21/2011	10:59:34 PM	Bypass valve opened
11/21/2011	10:59:34 PM	Helium MFC set to  0.000000
11/21/2011	10:59:34 PM	H2 MFC set to  0.000000
11/21/2011	10:59:34 PM	BCl3 MFC set to  0.000000
11/21/2011	10:59:34 PM	PHl3 MFC set to  0.000000
11/21/2011	10:59:34 PM	SiCl4 MFC set to  0.000000
11/21/2011	10:59:34 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	10:59:34 PM	Tube furnace set to 0
11/21/2011	11:00:34 PM	Helium valve closed
11/21/2011	11:00:34 PM	H2 valve closed
11/21/2011	11:00:34 PM	BCl3 valve closed
11/21/2011	11:00:34 PM	PH3 valve closed
11/21/2011	11:00:34 PM	SiCl4 pre valve closed
11/21/2011	11:00:34 PM	SiCl4 post valve closed
11/21/2011	11:00:34 PM	Bypass valve closed
11/21/2011	11:00:34 PM	Bubbler valve closed
11/21/2011	11:00:34 PM	Main Vac valve opened
11/21/2011	11:00:34 PM	Helium MFC set to  0.000000
11/21/2011	11:00:34 PM	H2 MFC set to  0.000000
11/21/2011	11:00:34 PM	BCl3 MFC set to  0.000000
11/21/2011	11:00:34 PM	PHl3 MFC set to  0.000000
11/21/2011	11:00:34 PM	SiCl4 MFC set to  0.000000
11/21/2011	11:00:34 PM	Bypass solenoid MFC set to  0.000000
11/21/2011	11:00:35 PM	Tube furnace set to 0
11/21/2011	11:00:36 PM	Run finished at 11:00 PM
11/21/2011	11:00:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
